Model | Chamber size(W*D*H) | Prosess gas | Control |
---|---|---|---|
OBTPS-LAB | 300ф X 300H | Ar, etc | Touch Panel |
OBTPS-500 | 500*500*500 | Ar, O2, etc | Touch Panel |
OBTPS-800 | 800*800*800 | Ar, O2, N2, etc | Touch Panel |
OBTPS-1000 | 1000*1000*1000 | Ar, O2, N2, etc | Touch Panel |
OBTPS-etc | Customized |